{"id":68285,"date":"2024-06-07T17:51:42","date_gmt":"2024-06-07T09:51:42","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=68285"},"modified":"2024-06-07T14:53:48","modified_gmt":"2024-06-07T06:53:48","slug":"%e5%90%88%e8%82%a5%e9%a1%b9%e7%9b%ae%e5%bf%ab%e8%bf%9b%ef%bc%8c%e8%ae%be%e5%a4%87%e4%bc%81%e4%b8%9a%e4%b8%80%e5%a1%94%e5%8d%8a%e5%af%bc%e4%bd%93%e8%8e%b7%e8%9e%8d%e8%b5%84","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/info\/newsdetail-68285.html","title":{"rendered":"\u5408\u80a5\u9879\u76ee\u201c\u5feb\u8fdb\u201d\uff0c\u8bbe\u5907\u4f01\u4e1a\u4e00\u5854\u534a\u5bfc\u4f53\u83b7\u878d\u8d44"},"content":{"rendered":"
6\u67085\u65e5\uff0c\u6839\u636e\u4e00\u5854\u534a\u5bfc\u4f53\u5b98\u65b9\u6d88\u606f\uff0c\u516c\u53f8\u8fd1\u65e5\u987a\u5229\u5b8c\u6210\u6570\u5343\u4e07Pre-A\u8f6e\u878d\u8d44\uff0c\u6295\u8d44\u65b9\u4e3a\u5408\u80a5\u6d77\u6052\u79d1\u521b\u4ea7\u6295\u57fa\u91d1\u53ca\u76f8\u5173\u4ea7\u4e1a\u6295\u8d44\u4eba\u3002<\/p>\n
\u636e\u6089\uff0c\u4e00\u5854\u534a\u5bfc\u4f53\uff08ETA-Semitech\uff09\u81f4\u529b\u4e8e\u534a\u5bfc\u4f53\u5236\u7a0b\u8bbe\u5907\u7684\u7814\u53d1\uff0c\u76ee\u524d\u5df2\u6210\u529f\u7814\u53d1\u5916\u5ef6\u7cfb\u7edf\uff08MOCVD\uff09\u548c\u9000\u706b\u7cfb\u7edf\uff08\u6fc0\u5149\u9000\u706b\/RTP\uff09\uff0c\u62e5\u6709SiC\/GaN\u5916\u5ef6\u751f\u957f\u65b9\u6848\uff0c\u5feb\u901f\u70ed\u5904\u7406\uff08RTA\uff09\u3001\u70ed\u6c27\u5316\uff08RTO\uff09\u3001\u70ed\u6c2e\u5316\uff08RTN\uff09\u3001\u79bb\u5b50\u6ce8\u5165\u9000\u706b\u3001\u91d1\u5c5e\u5408\u91d1\u3001\u529f\u7387\u82af\u7247\u80cc\u9762\u6fc0\u5149\u9000\u706b\u7b49\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n
\u76ee\u524d\uff0c\u4e00\u5854\u534a\u5bfc\u4f53\u62e5\u6709\u4e24\u5927\u4ea7\u7814\u57fa\u5730\uff0c\u5206\u522b\u4f4d\u4e8e\u5408\u80a5\u7ecf\u6d4e\u6280\u672f\u5f00\u53d1\u533a\u548c\u5fb7\u6e05\u6d59\u5de5\u5927\u79d1\u6280\u56ed\uff08\u7476\u5149\u534a\u5bfc\u4f53\uff08\u6d59\u6c5f\uff09\u6709\u9650\u516c\u53f8\uff09\u3002\u5176\u4e2d\uff0c\u5408\u80a5\u9879\u76ee\u5373\u5c06\u6295\u5165\u8bd5\u8fd0\u8425\u3002\u636e\u6089\uff0c\u8be5\u9879\u76ee\u603b\u6295\u8d443.5\u4ebf\uff0c\u9996\u671f\u9879\u76ee\u5efa\u8bbe\u9762\u79ef4000\u33a1\uff0c\u4e3b\u8981\u7528\u4e8eMOCVD\u5916\u5ef6\u7cfb\u7edf\u548cRTP\u5feb\u901f\u70ed\u5904\u7406\u7cfb\u7edf\u7684\u7814\u53d1\u53ca\u751f\u4ea7\uff0c\u8bd5\u8fd0\u8425\u540e\u5c06\u6b63\u5f0f\u542f\u52a8\u8bbe\u5907\u7684\u88c5\u914d\u548c\u8c03\u8bd5\u5de5\u4f5c\u3002<\/p>\n
\u6b64\u8f6e\u878d\u8d44\u5b8c\u6210\u540e\uff0c\u4e00\u5854\u534a\u5bfc\u4f53\u5c06\u8fdb\u4e00\u6b65\u52a0\u5febMOCVD\u3001RTP\u7b49\u8bbe\u5907\u7684\u5f00\u53d1\u8fdb\u7a0b\uff0c\u66f4\u597d\u5730\u4e3a\u534a\u5bfc\u4f53\u8bbe\u5907\u4ea7\u4e1a\u56fd\u4ea7\u5316\u63d0\u4f9b\u52a9\u529b\u3002<\/p>\n